Secondary electron energy spectra emitted from radio frequency biased plasma electrodes
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124268
Reference10 articles.
1. High power continuous wave atomic Xe laser with radio frequency excitation
2. Measurement of electron energy distribution in low-pressure RF discharges
3. Electron energy distributions in the negative glow and their relevance to hollow cathode lasers
4. Ion energy distributions in radio‐frequency discharges
5. Dynamics of collisionless rf plasma sheaths
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