1. Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
2. Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany
3. INRS-EMT, 1650 Boul. Lionel Boulet, J3X 1S2 Varennes, Quebec, Canada
4. Otto Schott Institute of Materials Research (OSIM), Friedrich Schiller University Jena, Fraunhoferstr. 6, 07743 Jena, Germany
5. Abbe Center of Photonics and Faculty of Physics, Friedrich-Schiller-University Jena, Max-Wien-Platz 1, 07743 Jena, Germany