Analysis of nonselective plasma etching of AlGaN by CF4∕Ar∕Cl2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1866490
Reference25 articles.
1. Deep Ultraviolet AlGaInN-Based Light-Emitting Diodes on Si(111) and Sapphire
2. Deep Ultraviolet Light Emitting Diodes Based on Short Period Superlattices of AlN/AlGa(In)N
3. 4.5 mW operation of AlGaN-based 267 nm deep-ultraviolet light-emitting diodes
4. 292 nm AlGaN Single-Quantum Well Light Emitting Diodes Grown on Transparent AlN Base
5. Room-temperature direct current operation of 290 nm light-emitting diodes with milliwatt power levels
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