Monte Carlo simulation of ion transport through rf glow‐discharge sheaths
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341062
Reference17 articles.
1. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
2. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
3. A comparative study of the radio frequency discharge in gas mixtures of helium with flourine, oxygen, nitrogen, and argon
4. Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive discharges
5. Ion bombardment energy distributions in radio‐frequency glow‐discharge systems
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