The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4807283
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1. Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications
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