Ion‐beam sputtering deposition of fluoropolymer thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109729
Reference4 articles.
1. Technology and applications of broad‐beam ion sources used in sputtering. Part II. Applications
2. Dual‐ion‐beam sputter deposition of TiN films
3. Polymer film formation in C2F6H2 discharges
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