Fabrication of amorphous micro-ring arrays in crystalline silicon using ultrashort laser pulses
Author:
Affiliation:
1. Laser Processing Group, Instituto de Óptica, CSIC, Serrano 121, 28006 Madrid, Spain
2. Instituto de Estructura de la Materia, CSIC, Serrano 121, 28006 Madrid, Spain
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4984110
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