Diagnostics of a N2/Ar direct current magnetron discharge for reactive sputter deposition of fullerene-like carbon nitride thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1625091
Reference27 articles.
1. Superhard and Elastic Carbon Nitride Thin Films Having Fullerenelike Microstructure
2. Influence of plasma parameters on the growth and properties of magnetron sputtered CNx thin films
3. Computer simulation of the ion beam deposition of binary thin films: Carbon nitride and boron carbide
4. Chemical sputtering of carbon films by low energy N2+ ion bombardment
5. Low-energy ion bombardment effects in reactive rf magnetron sputtering of carbon nitride films
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