Hunting the Origins of Line Width Roughness with Chemical Force Microscopy-Reference-Cited by-同舟云学术

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Hunting the Origins of Line Width Roughness with Chemical Force Microscopy

Published:2007 Issue: Volume: Page:
ISSN:0094-243X
Container-title:AIP Conference Proceedings
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Author:

Woodward John T.,Hwang Jeeseong,Prabhu Vivek M.,Choi Kwang-Woo,Seiler David G.,Diebold Alain C.,McDonald Robert,Garner C. Michael,Herr Dan,Khosla Rajinder P.,Secula Erik M.

Publisher

AIP

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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