Mounds Formed at Dislocations During Preferential Etching of (100) Silicon Surfaces
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1659629
Reference2 articles.
1. Copper Precipitation on Dislocations in Silicon
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3. Role of screw axes in dissolution of willemite;Geochimica et Cosmochimica Acta;1993-04
4. Oxygen distribution in silicon‐on‐insulator layers obtained by zone melting recrystallization;Journal of Applied Physics;1990-06-15
5. Selective etching and photoetching of {100} gallium arsenide in CrO3-HF aqueous solutions;Journal of Crystal Growth;1983-10
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