1. Fundamental Physical and Chemical Engineering Department, MSU, 119991 Moscow, Russia
2. Moscow Institute of Physics and Technology, 141700 Dolgoprudny, Russia
3. Institute of Solid State Physics RAS, 142432 Chernogolovka, Russia
4. Russian Quantum Center, Skolkovo, 143025 Moscow, Russia
5. The Laboratory of Superconducting Metamaterials, National University of Science and Technology MISIS, 119049 Moscow, Russia
6. Department of Materials Science, MSU, 119991 Moscow, Russia
7. Institute of Nanotechnology of Microelectronics RAS, 119991 Moscow, Russia
8. Department of Chemistry, MSU, 119991 Moscow, Russia
9. Solid State Physics Department, KFU, 420008 Kazan, Russia