Effect of structural in-depth heterogeneities on electrical properties of Pb(Zr0.52Ti0.48) O3 thin films as revealed by nano-beam X-ray diffraction

Author:

Vaxelaire N.12,Kovacova V.12,Bernasconi A.3,Le Rhun G.12,Alvarez-Murga M.12,Vaughan G. B. M.3,Defay E.4,Gergaud P.12

Affiliation:

1. Université Grenoble Alpes, Grenoble F-38000, France

2. CEA/LETI, MINATEC Campus, Grenoble F-38054, France

3. European Synchrotron Radiation Facility, F-38043 Grenoble, France

4. Luxembourg Institute of Science and Technology (LIST)-Materials Research and Technology Department, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Funder

European Synchrotron Radiation Facility (ESRF)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference35 articles.

1. Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

2. A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

3. Preparation of (001)-oriented Pb(Zr,Ti)O/sub 3/ thin films and their piezoelectric applications

4. M. Cueff et al., in 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (2010), pp. 212–215.

5. J. Lu , Y. Zhang , T. Itoh , and R. Maeda , in International Conference on Solid State Sensors, Actuators and Microsystems (2011), pp. 514–517.

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