Low-temperature growth of crystalline GaN films using energetic neutral atomic-beam lithography/epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2166485
Reference20 articles.
1. G. Popovici, H. Morkoc, and S. Noor Mohammad, in Group III Nitride Semiconductor Compounds, edited by B. Gil (Oxford Science Publications, Oxford, 1998), pp. 19–61.
2. VACUUM DEPOSITION OF AlN ACOUSTIC TRANSDUCERS
3. Preparation and optical properties of Ga1−xInxN thin films
4. Growth of AlN/GaN layered structures by gas source molecular-beam epitaxy
5. p‐type gallium nitride by reactive ion‐beam molecular beam epitaxy with ion implantation, diffusion, or coevaporation of Mg
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