Sidewall profile reconstruction of microstructures with high aspect ratio based on near-infrared light scanning interferometry
Author:
Affiliation:
1. School of Physics and Electronic Science, Shanxi Datong University, Shanxi 037009, China
2. Department of Physics, Taiyuan Normal University, Shanxi 030619, China
Funder
Science and Technology Infrastructure Program of the Ministry of Science and Technology of Shanxi Province, China
Shanxi Datong University Research Foundation for Ph. D.
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/1.5049494
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