Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas
Author:
Affiliation:
1. Department of Physics, Faculty of Science, Tanta University, Tanta 31527, Egypt
2. Electrodynamics and Physical Electronics Group, Brandenburg University of Technology Cottbus - Senftenberg, Cottbus 03046, Germany
Funder
Tanta University, Egypt.
The german Research Foundation in the frame of TRR87.
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4994754
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