Dynamic pulsed plasma reactor for chemical vapor deposition of advanced materials
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147928
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4. Nano-scale Morphology and Crystallography of Laser-Deposited TiN Thin Films;Japanese Journal of Applied Physics;2000-11-15
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