Determination of Stress in Films on Single Crystalline Silicon Substrates
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1719333
Reference6 articles.
1. Mechanical stresses in silicon oxide films
2. Mechanical stress considerations in thin-film devices
3. The Cause of Stress in Evaporated Metal Films
4. Stress Annealing in Vacuum Deposited Copper Films
5. Stress Anisotropy in Evaporated Iron Films
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