Sputtering yields of Si, SiC, and B4C under nanodroplet bombardment at normal incidence
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3211304
Reference24 articles.
1. Sputtering of silicon by a beamlet of electrosprayed nanodroplets
2. The Fluid Dynamics of Taylor Cones
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4. Fundamentals of Microfabrication
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