Ga-ion beam surface modification of glass using a custom-built liquid metal ion beam-Reference-Cited by-同舟云学术

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Ga-ion beam surface modification of glass using a custom-built liquid metal ion beam

Published:2022-01-07 Issue:1 Volume:131 Page:014901
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Cha Byeong Jun¹²,Byeon Woo Jun¹,Choi Chang Min¹^ORCID,Min Boo Ki³,Cho Jinwan¹^ORCID,Baek Ji Young¹,Kim Young Dok²,Choi Myoung Choul¹^ORCID

Affiliation:

1. Mass Spectrometry and Advanced Instrument Group, Korea Basic Science Institute, Ochang Center, Chungbuk 28119, Republic of Korea

2. Department of Chemistry, Sungkyunkwan University, Suwon 16419, Republic of Korea

3. New Business Division, ICD, 274 Mansero, Anseong, Gyeonggi-do 17542, Republic of Korea

Funder

Korea Basic Science Institute

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0071815

Reference17 articles.

1. Focused Ion Beams and Some Selected Applications

2. Focused ion beam technology and ultimate applications

3. J. Orloff, L. Swanson, and M. Utlaut, High Resolution Focused Ion Beams FIB and Its Applications (Kluwer Academic, New York, 2003), pp. 205–206.

4. Exploration of the ultimate patterning potential achievable with high resolution focused ion beams

5. Measurement of the energy distribution of a gallium liquid metal ion source

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