Low‐profile high‐efficiency microchannel‐plate detector system for scanning electron microscopy applications
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1141127
Reference41 articles.
1. Wide-band detector for micro-microampere low-energy electron currents
2. Submicrometer microelectronics dimensional metrology: scanning electron microscopy
3. SEM-based System For Calibration Of Linewidth SRMs For The IC industry
4. Microchannel plate detector for low voltage scanning electron microscopes
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