Generating large-area uniform microwave field for plasma excitation
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3692231
Reference26 articles.
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2. Dual-function circular polarization converter for microwave/plasma processing systems
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5. Experimental study on the characteristics of low power microwave plasma jet within local vacuum environment
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