Study of the changes in the infrared transmission of SiO2spin‐on‐glass due to ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105809
Reference3 articles.
1. Process Reliability Considerations of Planarization with Spin‐on‐Glass
2. The Characterization of the Residual Film Formed By Plasma Etching of Polysiloxane Spin‐on‐Glass on Aluminum
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