Femtosecond pulsed laser direct write production of nano- and microfluidic channels
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2201620
Reference12 articles.
1. Role of a native oxide on femtosecond laser interaction with silicon (100) near the damage threshold
2. O12.6 Fracture and Deformation of Thermal Oxide Films on Si (100) Using a Femtosecond Pulsed Laser
3. Micron-scale buckling of SiO2 on Si
4. Laser-Induced Blistering of Thin SiO2on Si
5. Laser-induced wavy pattern formation in metal thin films
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