Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4775603
Reference21 articles.
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2. L. Chang, Foundations of MEMS (China Machine, Beijing, 2008), pp. 223–224.
3. S. M. Sze, Semiconductor Sensors (Wiley, New York, 1994), pp. 17–80.
4. Review: Semiconductor Piezoresistance for Microsystems
5. The design and analysis of beam-membrane structure sensors for micro-pressure measurement
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