Extended defects of ion‐implanted GaAs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349854
Reference35 articles.
1. Ion Implantation in GaAs
2. A systematic analysis of defects in ion-implanted silicon
3. Mechanisms of amorphization and recrystallization in ion implanted III–V compound semiconductors
4. Ion implantation in GaAs
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