1. Institute of Modern Physics, Fudan University 1 , Shanghai 200433, People’s Republic of China
2. Applied Ion Beam Physics Laboratory, Fudan University 2 , Shanghai 200433, People’s Republic of China
3. Shanghai Institute of Applied Physics, Chinese Academy of Sciences 3 , Shanghai 201800, People’s Republic of China
4. Hongzhiwei Technology (Shanghai) Co., Ltd. 4 , Shanghai 201206, People’s Republic of China