Systematics of secondary‐ion‐mass spectrometry relative sensitivity factors versus electron affinity and ionization potential for a variety of matrices determined from implanted standards of more than 70 elements-Reference-Cited by-同舟云学术

Systematics of secondary‐ion‐mass spectrometry relative sensitivity factors versus electron affinity and ionization potential for a variety of matrices determined from implanted standards of more than 70 elements

Published:1991-01 Issue:1 Volume:69 Page:466-474
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Wilson R. G.,Novak S. W.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.347687

Reference14 articles.

1. Secondary ion mass spectrometry sensitivity factors versus ionization potential and electron affinity for many elements in HgCdTe and CdTe using oxygen and cesium ion beams

2. Ionization probability of sputtered atoms

3. Ion Microprobe Mass Analyzer

4. Characterization of solids and surfaces using ion beams and mass spectrometry

5. The sputtering process and sputtered ion emission

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