An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→A Σ3u+)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2537448
Reference62 articles.
1. Role of hydrogen on the deposition and properties of fluorinated silicon-nitride films prepared by inductively coupled plasma enhanced chemical vapor deposition using SiF4∕N2∕H2 mixtures
2. Control of plasma flux composition incident on TiN films during reactive magnetron sputtering and the effect on film microstructure
3. Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials
4. Control of nitrogen species in helicon plasmas
5. Evaluation of the rotational temperature in N2discharges using low-resolution spectroscopy
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