Electric fields in a sheath near a metal–dielectric interface
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1766075
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1. Ion bombardment energy and SiO2/Si fluorocarbon plasma etch selectivity
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4. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
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