Silicon implantation in GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90715
Reference9 articles.
1. Selenium implantation in GaAs
2. Tellurium implantation in GaAs
3. Silicon‐ and selenium‐ion‐implanted GaAs reproducibly annealed at temperatures up to 950 °C
4. Ion‐implanted silicon profiles in GaAs
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