The characteristics of Ta2O5 films deposited by radio frequency pure oxygen ion assisted deposition (RFOIAD) technology-Reference-Cited by-同舟云学术

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The characteristics of Ta2O5 films deposited by radio frequency pure oxygen ion assisted deposition (RFOIAD) technology

Published:2017-02-14 Issue:6 Volume:121 Page:065302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Han Jinghua¹,Zhang Qiuhui²,Fan Weixing¹,Feng Guoying¹,Li Yaguo³,Wei Aixiang⁴,Hu Ruifeng¹,Gu Qiongqiong¹

Affiliation:

1. College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China

2. Department of Electrical Information Engineering, Henan Institute of Engineering, Zhengzhou 451191, China

3. Fine Optical Engineering Research Center, Chengdu 610041, China

4. School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4975782

Reference52 articles.

1. Diamond field effect transistors with a high-dielectric constant Ta2O5as gate material

2. Integration of high-dielectric constant Ta2O5 oxides on diamond for power devices

3. Ionizing radiation effects on electrical and reliability characteristics of sputtered Ta2O5/Si interface

4. Investigation on thermal stability of Ta2O5, TiO2 and Al2O3 coatings for application at high temperature

5. Revelation on the Interrelated Mechanism of Polarity-Dependent and Multilevel Resistive Switching in TaOx-Based Memory Devices

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1. Enhancing the electrical characteristics of Ta2O5 based MOSCAP compared with conventional SiO2 based MOSCAP by varying temperature;AIP Conference Proceedings;2024

2. High performance UV photodetectors based on W doped δ -Ta2O5 single crystalline films;Applied Physics Letters;2023-06-19

3. Study on the Spectral and Laser Damage Resistance of CO, Laser Modified Sol -Gel SiO_2, Thin Films;SPECTROSC SPECT ANAL;2023

4. High-power laser-induced optical aberrations on beam director mirrors;Optical Engineering;2021-06-10

5. Laser plasma-induced damage characteristics of Ta2O5 films;Optical Materials Express;2019-06-26

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