Note: Alignment/focus dependent core-line sensitivity for quantitative chemical analysis in hard x-ray photoelectron spectroscopy using a hemispherical electron analyzer
Author:
Funder
U.S. Department of Energy
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4795406
Reference7 articles.
1. High resolution-high energy x-ray photoelectron spectroscopy using third-generation synchrotron radiation source, and its application to Si-high k insulator systems
2. Chemical analysis of HfO2∕Si (100) film systems exposed to NH3 thermal processing
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4. Correction of non-linearity effects in detectors for electron spectroscopy
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