Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas-Reference-Cited by-同舟云学术

Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas

Published:2016-03-21 Issue:11 Volume:119 Page:113302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Han Dao-Man¹²,Liu Zi-Geng²,Liu Yong-Xin¹²,Zhang Xin-Pu²,Gao Fei¹²,Peng Wei²,Wang You-Nian¹²

Affiliation:

1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), Dalian University of Technology, Dalian 116024, China

2. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Funder

Fundamental Research Funds for the Central Universities

National Natural Science Foundation of China (NSFC)

China Postdoctoral Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4943942

Reference28 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Ion energy uniformity in high-frequency capacitive discharges

3. Standing wave and skin effects in large-area, high-frequency capacitive discharges

4. Electromagnetic effects in high-frequency large-area capacitive discharges: A review

5. Experimental diagnostics of plasma radial uniformity and comparisons with computational simulations in capacitive discharges

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