Influence of polar distribution on piezoelectric response of aluminum nitride thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2892041
Reference23 articles.
1. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
2. The Effect of Microstructure on AlN MEMS Resonator Response
3. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality
4. Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators
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3. Structural and piezoelectric properties of AlN thin films grown by pressure gradient sputtering;Japanese Journal of Applied Physics;2022-11-11
4. Influence of the Li and M (M = V, Nb, Ta, or Zr) Composition Ratio on the Piezoelectric Properties of LiM-doped AlN Films;International Journal of the Society of Materials Engineering for Resources;2022-04-30
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