Influence of gridded gate structure on gas sensing behavior of hydrogen
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4879875
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3. Effect of RF Plasma on Gridded Gate Pt/SiO2/Si MOS Sensor for Detection of Hydrogen;IEEE Sensors Journal;2016-08
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