Pulsed laser deposition with rapid beam deflection by a galvanometer mirror scanner
Author:
Affiliation:
1. Department of Applied Chemistry, Tohoku University, Sendai, Miyagi, 980-8579, Japan
2. Institute for Solid State Physics, University of Tokyo, 5-1-5 Kashiwanoha, Chiba 277-8581, Japan
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5104291
Reference33 articles.
1. Pulsed Laser Deposition of Thin Films
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5. Artificial charge-modulationin atomic-scale perovskite titanate superlattices
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