Effect of ion bombardment on in-plane texture, surface morphology, and microstructure of vapor deposited Nb thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365217
Reference16 articles.
1. Effects of Crystallographic Orientation on Film Morphological Evolution
2. Mechanical Behavior of Single Crystal A1 (111) and Bicrystal Al (110) Films on Silicon Substrates
3. Ion-beam-induced texture formation in vacuum-condensed thin metal films
4. Crystalline reorientation due to ion bombardment
5. Theory of thin‐film orientation by ion bombardment during deposition
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