Electrical properties of ZrO2 gate dielectric on SiGe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125801
Reference12 articles.
1. Physics and applications of GexSi1-x/Si strained-layer heterostructures
2. 73-GHz self-aligned SiGe-base bipolar transistors with phosphorus-doped polysilicon emitters
3. Kinetics and mechanism of oxidation of SiGe: dry versus wet oxidation
4. Insituobservations of misfit dislocation propagation in GexSi1−x/Si(100) heterostructures
5. Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing
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