Self-sensing cantilevers with integrated conductive coaxial tips for high-resolution electrical scanning probe metrology-Reference-Cited by-同舟云学术

Self-sensing cantilevers with integrated conductive coaxial tips for high-resolution electrical scanning probe metrology

Author:

Haemmerli Alexandre J.¹,Harjee Nahid²,Koenig Markus³,Garcia Andrei G. F.³,Goldhaber-Gordon David³,Pruitt Beth L.¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, North Carolina 94305, USA

2. Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, North Carolina 94305, USA

3. Department of Physics, Stanford University, 382 Via Pueblo Mall, Stanford, North Carolina 94305, USA

Funder

National Science Foundation (NSF)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

Reference50 articles.

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