Micro-Raman characterization of crystallinity of laser-recrystallized silicon films on SiO2 insulators
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370190
Reference23 articles.
1. Raman study of polish‐induced surface strain in 〈100〉 GaAs and InP
2. Raman microprobe study of recrystallization in ion‐implanted and laser‐annealed polycrystalline silicon
3. Measurement of local stress in laser‐recrystallized lateral epitaxial silicon films over silicon dioxide using Raman scattering
4. Raman microprobe study of silicon- and germanium- on-insulator structures
5. Raman spectra from Ga1−xInxAs epitaxial layers grown on GaAs and InP substrates
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