Single-crystal aluminum nitride nanomechanical resonators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1396633
Reference12 articles.
1. Growth and applications of Group III-nitrides
2. Patterning of AlN, InN, and GaN in KOH‐based solutions
3. Fabrication of submicron high-aspect-ratio GaAs actuators
4. SCREAM MicroElectroMechanical Systems
5. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
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