A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion–surface collisions
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149979
Reference17 articles.
1. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung
2. Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching
3. New Method for Measuring Sputtering in the Region Near Threshold
4. Electronic sputtering of solid nitrogen and oxygen by keV electrons
5. Potential Sputtering of Lithium Fluoride by Slow Multicharged Ions
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