Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling-Reference-Cited by-同舟云学术

Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling

Author:

Zhigunov D. M.¹,Sarikov A.²³^ORCID,Chesnokov Yu. M.⁴,Vasiliev A. L.⁴,Zakharov N.⁵^ORCID,Kashkarov P. K.¹⁴

Affiliation:

1. Faculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory 1, 119991 Moscow, Russia

2. IMDEA Materials Institute, c/ Eric Kandel, 2, 28906 Getafe, Madrid, Spain

3. V. Lashkarev Institute of Semiconductor Physics NAS Ukraine, 45 Nauki Avenue, 03028 Kiev, Ukraine

4. National Research Centre “Kurchatov Institute”, pl. Akademika Kurchatova 1, 123182 Moscow, Russia

5. Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany

Funder

Russian Foundation for Basic Research (RFBR)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

Reference17 articles.

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