Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Author:

Goto Takumi1,Nakamori Hiroki1,Kimura Takashi2,Sano Yasuhisa1,Kohmura Yoshiki3,Tamasaku Kenji3,Yabashi Makina3,Ishikawa Tetsuya3,Yamauchi Kazuto145,Matsuyama Satoshi1

Affiliation:

1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

2. Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan

3. SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan

4. Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

5. CREST, JST, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

AIP Publishing

Subject

Instrumentation

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