Thickness dependence of the physical properties of atomic-layer deposited Al2O3-Reference-Cited by-同舟云学术

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Thickness dependence of the physical properties of atomic-layer deposited Al2O3

Published:2019-05-14 Issue:18 Volume:125 Page:185302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Etinger-Geller Yael¹^ORCID,Zoubenko Ekaterina¹^ORCID,Baskin Maria²,Kornblum Lior²³^ORCID,Pokroy Boaz¹³

Affiliation:

1. Department of Materials Science and Engineering, Technion—Israel Institute of Technology, Haifa 32000, Israel

2. Andrew and Erna Viterbi Faculty of Electrical Engineering, Technion—Israel Institute of Technology, Haifa 32000, Israel

3. Russell Berrie Nanotechnology Institute, Technion—Israel Institute of Technology, Haifa 32000, Israel

Funder

FP7 Ideas: European Research Council

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5079987

Reference41 articles.

1. Topics in the theory of amorphous materials

2. Size Effect on the Short Range Order and the Crystallization of Nanosized Amorphous Alumina

3. Density of Nanometrically Thin Amorphous Films Varies by Thickness

4. Density dependent mechanical properties and structures of a freeze dried biopharmaceutical excipient – Sucrose

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2. Low temperature (002)-oriented zinc oxide films prepared using ozone-based spatial atomic layer deposition;Ceramics International;2024-08

3. Isotropic and Anisotropic Complex Refractive Index of PEDOT:PSS;Polymers;2023-08-04

4. Recombination in Passivating Contacts: Investigation Into the Impact of the Contact Work Function on the Obtained Passivation;Solar RRL;2023-03-28

5. Modeling of Conduction Mechanisms in Ultrathin Films of Al2O3 Deposited by ALD;Electronics;2023-02-10

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