Formation of stress-controlled, highly textured, α-SiC thin films at 950 °C
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4733967
Reference55 articles.
1. Electronic Band Structure of SiC Polytypes: A Discussion of Theory and Experiment
2. Chapter 1 Materials Properties and Characterization of SiC
3. Chapter 4 SiC Transistors
4. A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications
5. Silicon Carbide Microelectromechanical Systems for Harsh Environments
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