The effects of surface roughness on the angle‐dependent total‐reflection x‐ray fluorescence of ultrathin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360291
Reference18 articles.
1. Optical Flats for Use in X‐Ray Spectrochemical Microanalysis
2. Total-Reflection X-Ray Fluorescence Analysis Using Monochromatic Beam
3. Impurity Analysis on Si Wafer Using Monochro-Trex
4. Basic features of total-reflection X-ray fluorescence analysis on silicon wafers
5. Near-Surface Analysis of Semicondutor Using Grazing Incidence X-Ray Fluorescence
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