Author:
Deng L. G.,Rahman M.,Wilkinson C. D. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
7 articles.
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1. Luminescence enhancement of plasma-etched InAsP∕InGaAsP quantum wells;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2008-03
2. Experimental and Theoretical Analysis of Argon Plasma-Enhanced Quantum-Well Intermixing;IEEE Journal of Quantum Electronics;2004-02
3. Dry etching and sputtering;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;2003-11-25
4. Issues in Etching Compound and Si-based Devices;Japanese Journal of Applied Physics;2002-06-30
5. Minimization of dry etch damage in III-V semiconductors;Journal of Physics D: Applied Physics;2001-09-05