Sub-30-nm patterning on quartz for imprint lithography templates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2963982
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1. Statics and Dynamics of Single DNA Molecules Confined in Nanochannels
2. The dynamics of genomic-length DNA molecules in 100-nm channels
3. Photonic crystals from step and flash imprint lithography
4. Nanoscale GaAs metal–semiconductor–metal photodetectors fabricated using nanoimprint lithography
5. Fabrication of a Molecular Self-Assembled Monolayer Diode Using Nanoimprint Lithography
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