Capacitively coupled radio frequency nitrogen plasma generated at two different exciting frequencies of 13.56 MHz and 40 MHz analyzed using Langmuir probe along with optical emission spectroscopy
Author:
Affiliation:
1. Department of Physics, Canakkale Onsekiz Mart University, Canakkale 17100, Turkey
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5092180
Reference45 articles.
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